{"id":630,"date":"2023-11-29T07:28:49","date_gmt":"2023-11-29T07:28:49","guid":{"rendered":"https:\/\/test.metrosemi.com\/?page_id=630"},"modified":"2023-12-14T12:43:27","modified_gmt":"2023-12-14T12:43:27","slug":"tms-2000","status":"publish","type":"page","link":"https:\/\/test.metrosemi.com\/?page_id=630","title":{"rendered":"TMS-2000"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-page\" data-elementor-id=\"630\" class=\"elementor elementor-630\">\n\t\t\t\t<div class=\"elementor-element elementor-element-d44e87a e-flex e-con-boxed e-con e-parent\" data-id=\"d44e87a\" data-element_type=\"container\" data-e-type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t<div class=\"elementor-element elementor-element-9258237 e-con-full e-flex e-con e-child\" data-id=\"9258237\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-d487784 elementor-widget elementor-widget-text-editor\" data-id=\"d487784\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<h3>TMS-2000<\/h3><h4><strong>Wafer Thickness Mapping System<\/strong><\/h4><div class=\"row row1\"><div class=\"col-sm-6\"><h5>The TMS-2000 can measure the flatness of the wafer with up to 1 nm repeatability. Conventional wafer thickness mapping techniques struggle with accuracy issues when used in unstable environments involving extreme temperature changes and vibrations while the TMS-2000 has high environmental stability. Thanks to its high-speed measurement capability and compact size, the TMS-2000 can be used in various industrial fields involving in-line inspection.<br \/><br \/>\u25aa High accuracy measurement using interferometric detection technique<br \/>\u25aaEvaluation of flatness parameters in accordance with the SEMI standards<br \/>\u25aaHigh environmental resistance<br \/>\u25aaCompact device size for multiple applications<br \/>\u25aaSpiral scanning (high speed, high density) (1 nm repeatability)<\/h5><\/div><\/div>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-4568a00 e-con-full e-flex e-con e-child\" data-id=\"4568a00\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-e5982b6 elementor-widget elementor-widget-image\" data-id=\"e5982b6\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"316\" height=\"340\" src=\"https:\/\/test.metrosemi.com\/wp-content\/uploads\/2023\/12\/01-1.png\" class=\"attachment-large size-large wp-image-888\" alt=\"\" srcset=\"https:\/\/test.metrosemi.com\/wp-content\/uploads\/2023\/12\/01-1.png 316w, https:\/\/test.metrosemi.com\/wp-content\/uploads\/2023\/12\/01-1-279x300.png 279w\" sizes=\"(max-width: 316px) 100vw, 316px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-50c3884 e-flex e-con-boxed e-con e-parent\" data-id=\"50c3884\" data-element_type=\"container\" data-e-type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t<div class=\"elementor-element elementor-element-8731d0b e-con-full e-flex e-con e-child\" data-id=\"8731d0b\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-93fde08 elementor-widget elementor-widget-text-editor\" data-id=\"93fde08\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<h4><strong>Analysis Software<\/strong><\/h4><div class=\"col-sm-5\"><h5>The TMS-2000 comes with unique data acquisition software for consistent measurement, analysis and data output. The stage can hold up to 12 inch wafers, and once set, it automatically detects the notch position and wafer center effectively auto-loading coordinate data. In addition to thickness mapping and line profile analysis, flatness parameters compliant with SEMI standards can be statistically analyzed and the data can be output in any format. It can also analyze the thickness difference between the two specified wafers so it can be used for monitoring the polishing process.<\/h5><\/div>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-9f7f651 e-con-full e-flex e-con e-child\" data-id=\"9f7f651\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-fb301de elementor-widget elementor-widget-image\" data-id=\"fb301de\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"467\" height=\"316\" src=\"https:\/\/test.metrosemi.com\/wp-content\/uploads\/2023\/12\/02-2.png\" class=\"attachment-large size-large wp-image-889\" alt=\"\" srcset=\"https:\/\/test.metrosemi.com\/wp-content\/uploads\/2023\/12\/02-2.png 467w, https:\/\/test.metrosemi.com\/wp-content\/uploads\/2023\/12\/02-2-300x203.png 300w\" sizes=\"(max-width: 467px) 100vw, 467px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-29312ed e-flex e-con-boxed e-con e-parent\" data-id=\"29312ed\" data-element_type=\"container\" data-e-type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-e38422a elementor-widget elementor-widget-heading\" data-id=\"e38422a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Specification<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-a0c867b e-flex e-con-boxed e-con e-parent\" data-id=\"a0c867b\" data-element_type=\"container\" data-e-type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-4fff546 elementor-widget elementor-widget-image\" data-id=\"4fff546\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"826\" height=\"417\" src=\"https:\/\/test.metrosemi.com\/wp-content\/uploads\/2023\/12\/03-2.png\" class=\"attachment-large size-large wp-image-890\" alt=\"\" srcset=\"https:\/\/test.metrosemi.com\/wp-content\/uploads\/2023\/12\/03-2.png 826w, https:\/\/test.metrosemi.com\/wp-content\/uploads\/2023\/12\/03-2-300x151.png 300w, https:\/\/test.metrosemi.com\/wp-content\/uploads\/2023\/12\/03-2-768x388.png 768w\" sizes=\"(max-width: 826px) 100vw, 826px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>TMS-2000 Wafer Thickness Mapping System The TMS-2000 can measure the flatness of the wafer with up to 1 nm repeatability. Conventional wafer thickness mapping techniques struggle with accuracy issues when used in unstable environments involving extreme temperature changes and vibrations while the TMS-2000 has high environmental stability. Thanks to its high-speed measurement capability and compact [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"no-sidebar","site-content-layout":"page-builder","ast-site-content-layout":"full-width-container","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"disabled","ast-breadcrumbs-content":"","ast-featured-img":"disabled","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"class_list":["post-630","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/test.metrosemi.com\/index.php?rest_route=\/wp\/v2\/pages\/630","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/test.metrosemi.com\/index.php?rest_route=\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/test.metrosemi.com\/index.php?rest_route=\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/test.metrosemi.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/test.metrosemi.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=630"}],"version-history":[{"count":4,"href":"https:\/\/test.metrosemi.com\/index.php?rest_route=\/wp\/v2\/pages\/630\/revisions"}],"predecessor-version":[{"id":893,"href":"https:\/\/test.metrosemi.com\/index.php?rest_route=\/wp\/v2\/pages\/630\/revisions\/893"}],"wp:attachment":[{"href":"https:\/\/test.metrosemi.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=630"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}