{"id":606,"date":"2023-11-29T07:24:04","date_gmt":"2023-11-29T07:24:04","guid":{"rendered":"https:\/\/test.metrosemi.com\/?page_id=606"},"modified":"2023-12-15T15:14:24","modified_gmt":"2023-12-15T15:14:24","slug":"fsm-128l","status":"publish","type":"page","link":"https:\/\/test.metrosemi.com\/?page_id=606","title":{"rendered":"FSM 128L"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-page\" data-elementor-id=\"606\" class=\"elementor elementor-606\">\n\t\t\t\t<div class=\"elementor-element elementor-element-113739b e-flex e-con-boxed e-con e-parent\" data-id=\"113739b\" data-element_type=\"container\" data-e-type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-b329bb8 elementor-widget elementor-widget-text-editor\" data-id=\"b329bb8\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<h3><strong>FSM 128NT<\/strong><\/h3><h5>The FSM 128 is an automated stress measurement tool. This tool measures wafer curvature, bow and other important information using a non-contact technique that will not damage the wafer. FSM 128 is designed to measure the amount of curvature of semiconductor wafers in a production environment requiring high reliability and performance.<\/h5>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-3bd826d e-flex e-con-boxed e-con e-parent\" data-id=\"3bd826d\" data-element_type=\"container\" data-e-type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t<div class=\"elementor-element elementor-element-6065711 e-con-full e-flex e-con e-child\" data-id=\"6065711\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-006b452 elementor-widget elementor-widget-text-editor\" data-id=\"006b452\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<h4><strong>DESCRIPTION SPECIFICATIONS<\/strong><\/h4><div class=\"feature-list\"><ul><li><b>Stress range:<\/b> 1 x 107to 4 x 1010 dynes\/cm2 (10 power 7)<\/li><li><b>Wafer bow sensitivity\u00a0<\/b>1 micron bow height change. P doped Si<\/li><li><b>Wafer sizes:\u00a0<\/b>50mm, 100mm, 150mm, and 200mm<\/li><li><b>Scan range\u00a0<\/b>Up to 194mm with 3mm edge exclusion<\/li><li><b>Mapping:<\/b>Multiple scan lines for wafer maps up to 32 line scans, 6 lines recommended.<\/li><li><b>Data Acqusition:<\/b>40 points\/mm along line scan<\/li><li><b>Scan line:<\/b>Single scan line at any wafer orientation<\/li><li>The system is able to determine film stress (either compressive or tensile) from 1X107 dynes\/cm2 to 4X1010 dynes\/cm2<\/li><li>System is capable of performing single scan line or multi scan lines for stress or wafer bow mapping.<\/li><li>Motorized rotational stage for 2D film stress and wafer bow mapping.<\/li><li>Capable of measuring very bow wafers of up to 300um bow height.<\/li><li>Windows 7,8,10 &amp;11 operating system.<\/li><li>Software for stress, radius and wafer bow.<\/li><li>Export of data to excel.<\/li><li>Export of tables, graphs and maps as jpeg files.<\/li><\/ul><\/div>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-b24183d e-con-full e-flex e-con e-child\" data-id=\"b24183d\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-60768d1 elementor-widget__width-initial elementor-widget elementor-widget-image\" data-id=\"60768d1\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"330\" height=\"288\" src=\"https:\/\/test.metrosemi.com\/wp-content\/uploads\/2023\/11\/fsm128nt.28017f11bf0907aec700.png\" class=\"attachment-full size-full wp-image-779\" alt=\"\" srcset=\"https:\/\/test.metrosemi.com\/wp-content\/uploads\/2023\/11\/fsm128nt.28017f11bf0907aec700.png 330w, https:\/\/test.metrosemi.com\/wp-content\/uploads\/2023\/11\/fsm128nt.28017f11bf0907aec700-300x262.png 300w\" sizes=\"(max-width: 330px) 100vw, 330px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-cd8a4ea e-flex e-con-boxed e-con e-parent\" data-id=\"cd8a4ea\" data-element_type=\"container\" data-e-type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-8f149b4 elementor-widget elementor-widget-text-editor\" data-id=\"8f149b4\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<h4><strong>Result Presentaion<\/strong><\/h4><h5>Scans at different angles across the diameter of the wafer are different from each other revealing that the wafer is not a perfect sphere.<\/h5>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-c645b68 e-flex e-con-boxed e-con e-parent\" data-id=\"c645b68\" data-element_type=\"container\" data-e-type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-b7d9cea elementor-widget elementor-widget-image\" data-id=\"b7d9cea\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"986\" height=\"503\" src=\"https:\/\/test.metrosemi.com\/wp-content\/uploads\/2023\/11\/fsm128nt1.f2c323bc6e68f585d89b.png\" class=\"attachment-large size-large wp-image-780\" alt=\"\" srcset=\"https:\/\/test.metrosemi.com\/wp-content\/uploads\/2023\/11\/fsm128nt1.f2c323bc6e68f585d89b.png 986w, https:\/\/test.metrosemi.com\/wp-content\/uploads\/2023\/11\/fsm128nt1.f2c323bc6e68f585d89b-300x153.png 300w, https:\/\/test.metrosemi.com\/wp-content\/uploads\/2023\/11\/fsm128nt1.f2c323bc6e68f585d89b-768x392.png 768w\" sizes=\"(max-width: 986px) 100vw, 986px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-010179d e-flex e-con-boxed e-con e-parent\" data-id=\"010179d\" data-element_type=\"container\" data-e-type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-3fde16d elementor-widget elementor-widget-image\" data-id=\"3fde16d\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"652\" height=\"428\" src=\"https:\/\/test.metrosemi.com\/wp-content\/uploads\/2023\/11\/fsm128nt2.420e18c41dc65a5b418a.png\" class=\"attachment-large size-large wp-image-781\" alt=\"\" srcset=\"https:\/\/test.metrosemi.com\/wp-content\/uploads\/2023\/11\/fsm128nt2.420e18c41dc65a5b418a.png 652w, https:\/\/test.metrosemi.com\/wp-content\/uploads\/2023\/11\/fsm128nt2.420e18c41dc65a5b418a-300x197.png 300w\" sizes=\"(max-width: 652px) 100vw, 652px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-e9f93a9 e-flex e-con-boxed e-con e-parent\" data-id=\"e9f93a9\" data-element_type=\"container\" data-e-type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-a5ed685 elementor-widget elementor-widget-text-editor\" data-id=\"a5ed685\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<h3><strong>FSM 128L<\/strong><\/h3><h5>Film stress and wafer bow measurement for wafers up to 300mm diameter. 2D\/3D stress mapping standard. Semi-automated system with convenient wafer loading and retrieval. c<\/h5>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-e84728f e-flex e-con-boxed e-con e-parent\" data-id=\"e84728f\" data-element_type=\"container\" data-e-type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t<div class=\"elementor-element elementor-element-3f28a8e e-con-full e-flex e-con e-child\" data-id=\"3f28a8e\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-9ac9336 elementor-widget elementor-widget-text-editor\" data-id=\"9ac9336\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<h4><strong>Features<\/strong><\/h4><div class=\"feature-list\"><ul><li>Accept wafer up to 300mm.<\/li><li>Patented automatic dual laser switching.<\/li><li>Motorized rotational stage for 2D film stress and wafer bow mapping.<\/li><li>Capable of measuring very bow wafers of up to 300um bow height.<\/li><li>Windows 7,8,10 &amp;11 operating system.<\/li><li>Software for stress, radius and wafer bow.<\/li><li>Export of data to excel.<\/li><li>Export of tables, graphs and maps as jpeg files.<\/li><\/ul><\/div>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-4d0ffb3 e-con-full e-flex e-con e-child\" data-id=\"4d0ffb3\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-b638621 elementor-widget elementor-widget-image\" data-id=\"b638621\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"360\" height=\"315\" src=\"https:\/\/test.metrosemi.com\/wp-content\/uploads\/2023\/11\/FSM-128L.jpg\" class=\"attachment-large size-large wp-image-477\" alt=\"\" srcset=\"https:\/\/test.metrosemi.com\/wp-content\/uploads\/2023\/11\/FSM-128L.jpg 360w, https:\/\/test.metrosemi.com\/wp-content\/uploads\/2023\/11\/FSM-128L-300x263.jpg 300w\" sizes=\"(max-width: 360px) 100vw, 360px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-e7e3afe e-flex e-con-boxed e-con e-parent\" data-id=\"e7e3afe\" data-element_type=\"container\" data-e-type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-865a430 elementor-widget elementor-widget-text-editor\" data-id=\"865a430\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<h3><strong>FSM128 C2C<\/strong><\/h3><h5>Dedicated Film Stress mapping system with high resolution for high throughput process control for wafers up to 200mm diameter. Fully automated cassette to cassette, SECS\/GEM Film Stress and Bow Measurement tool. Dual or single load port configurations available. Integrated wafer substrate thickness measurement available.<\/h5>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-d448e96 e-flex e-con-boxed e-con e-parent\" data-id=\"d448e96\" data-element_type=\"container\" data-e-type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t<div class=\"elementor-element elementor-element-2d623ef e-con-full e-flex e-con e-child\" data-id=\"2d623ef\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-b18a318 elementor-widget elementor-widget-text-editor\" data-id=\"b18a318\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<h4><strong>Features<\/strong><\/h4><div class=\"feature-list\"><ul><li>Robotic cassette to cassette Film Stress measurement system<\/li><li>Single open cassette load port configuration<\/li><li>Fully automatic loading of 200mm wafers from open cassette<\/li><li>Notch Pre-Aligner<\/li><li>Patented automatic dual laser to cover measurement of a wide range of films<\/li><li>Motorized rotational stage for mapping up to 32-line scans providing 2D and 3D film stress and wafer bow maps<\/li><li>2D\/3D film stress and wafer bow maps<\/li><li>High speed with throughput of greater than 50 wafers\/hour<\/li><li>Capable of measuring very bowed wafers of up to 300\u03bcm bow height.<\/li><li>Windows 7, 8, 10 &amp;11 operating system.<\/li><li>Software for stress, radius and wafer bow.<\/li><\/ul><\/div>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-d706705 e-con-full e-flex e-con e-child\" data-id=\"d706705\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-5b9d53d elementor-widget elementor-widget-image\" data-id=\"5b9d53d\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"347\" height=\"453\" src=\"https:\/\/test.metrosemi.com\/wp-content\/uploads\/2023\/11\/FSM-128C2C.0093df21c6675a173608.png\" class=\"attachment-large size-large wp-image-782\" alt=\"\" srcset=\"https:\/\/test.metrosemi.com\/wp-content\/uploads\/2023\/11\/FSM-128C2C.0093df21c6675a173608.png 347w, https:\/\/test.metrosemi.com\/wp-content\/uploads\/2023\/11\/FSM-128C2C.0093df21c6675a173608-230x300.png 230w\" sizes=\"(max-width: 347px) 100vw, 347px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>FSM 128NT The FSM 128 is an automated stress measurement tool. This tool measures wafer curvature, bow and other important information using a non-contact technique that will not damage the wafer. FSM 128 is designed to measure the amount of curvature of semiconductor wafers in a production environment requiring high reliability and performance. DESCRIPTION SPECIFICATIONS [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"no-sidebar","site-content-layout":"page-builder","ast-site-content-layout":"full-width-container","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"disabled","ast-breadcrumbs-content":"","ast-featured-img":"disabled","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"class_list":["post-606","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/test.metrosemi.com\/index.php?rest_route=\/wp\/v2\/pages\/606","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/test.metrosemi.com\/index.php?rest_route=\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/test.metrosemi.com\/index.php?rest_route=\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/test.metrosemi.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/test.metrosemi.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=606"}],"version-history":[{"count":19,"href":"https:\/\/test.metrosemi.com\/index.php?rest_route=\/wp\/v2\/pages\/606\/revisions"}],"predecessor-version":[{"id":1042,"href":"https:\/\/test.metrosemi.com\/index.php?rest_route=\/wp\/v2\/pages\/606\/revisions\/1042"}],"wp:attachment":[{"href":"https:\/\/test.metrosemi.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=606"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}